Semiconductor Process Ovens

AOL-100GV-HMI

Wafer Baking Oven

Wafer Baking Oven documented on the official DONE-E product page. Performance and configuration vary by model; the values below are included only when present in that source.

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AOL-100GV-HMI — official DONE-E product image

Key performance

Published values at a glance.

Values are shown only when they were extractable from this model's official DONE-E page.

Chamber dimensions: W 61 0×H 65 0×D 75 0
Exterior dimensions: W1900 × H2075 × D1250
Temperature range: + 6 0 to 62 0°C
Temperature uniformity: 200 °C± 3 °C

Product overview

Source-led, model-specific information.

Wafer Baking Oven documented on the official DONE-E product page. Performance and configuration vary by model; the values below are included only when present in that source.

Data status

Verified specifications translated from the official product page

Source verification

Official DONE-E source URLs are retained in the internal product data for factual audit.

Applications

Exact English application wording is to be confirmed. This product is currently organized under Semiconductor Process Ovens; engineering review is required before matching it to a process.

Technical specifications

Published model data.

No value is borrowed from another product. Fields missing from the official page remain unpublished here.

Chamber dimensions	W 61 0×H 65 0×D 75 0
Exterior dimensions	W1900 × H2075 × D1250
Temperature range	+ 6 0 to 62 0°C
Temperature uniformity	200 °C± 3 °C
Vacuum level	＜ 133Pa
Rated power	14 KW
Cleanliness	Class 100
Oxygen concentration	≤20 ppm