AO-2DSL-FCNET
Low-Oxygen Oven
- Chamber dimensions
- W1000 × D500 × H610 × 2 mm
- Temperature range
- RT (Ambient) +60 to +300°C
Semiconductor Process Ovens
QMO-6D
Six-Chamber Clean Low-Oxygen Oven
A six-chamber clean, low-oxygen system with programmable control, PC monitoring, and documented MES connectivity.
Key performance
Published values at a glance.
Values are shown only when they were extractable from this model's official DONE-E page.
- Chambers
- 6
- Chamber size
- W500 × H500 × D500 mm × 6
- Temperature range
- RT +20°C to 300°C
- Cleanliness
- Class 100
Product overview
Source-led, model-specific information.
A six-chamber clean, low-oxygen system with programmable control, PC monitoring, and documented MES connectivity.
Data status
Manually reviewed against the official DONE-E product page
Source verification
Official DONE-E source URLs are retained in the internal product data for factual audit.
Applications
- Clean low-oxygen thermal processing
- Multi-batch semiconductor production
- Programmable heating and controlled cooling
Technical specifications
Published model data.
No value is borrowed from another product. Fields missing from the official page remain unpublished here.
| Chambers | 6 |
|---|---|
| Chamber size | W500 × H500 × D500 mm × 6 |
| Temperature range | RT +20°C to 300°C |
| Cleanliness | Class 100 |
| Oxygen concentration | ≤20 ppm |
| Empty uniformity | ±1.5% |
| Loaded uniformity | ±2% |
Translation and unit presentation are provided for navigation. The cited official source remains the audit reference.
Features, control & automation
Only capabilities detected on this product page.
- Omron PLC and PC interface
- Multi-step programmable control
- Multi-equipment monitoring from the PC
- Historical data, operation, and alarm queries
- MES connectivity
- Door, heater, and damper interlocks
Downloads
Technical documents.
English datasheet
Coming soon — no PDF fabricated
Application guide
Coming soon — no PDF fabricated
Related products
More in Semiconductor Process Ovens.
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- Temperature range
- Ambient+20°C to 500°C
- Cleanliness
- Class 100
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- Chamber dimensions
- W 61 0×H 65 0×D 75 0
- Exterior dimensions
- W1900 × H2075 × D1250
Engineering review